Published September 1977 | Version v1
Book

The preparation of Nb-Gesub(x) films by reactive sputtering

  • 1. Kernforschungsanlage Juelich G.m.b.H. (Germany, F.R.). Inst. fuer Festkoerperforschung

Description

NbGesub(x) films have been deposited by reactive sputtering of niobium in an argon/germane atmosphere. The structure and composition of the films have been determined by x-ray diffraction and ion backscattering respectively. It was found that the composition changes in the range 5 10-2<=x<=50, depending on the germane partial pressure. It was not possible to obtain the Nb3Ge A 15 structure by this method. (Auth.)

Additional details

Publishing Information

Publisher
Oesterr. Studiengesellschaft fuer Atomenergie G.m.b.H.
Imprint Place
Vienna, Austria
Imprint Title
Proceedings of the seventh international vacuum congress and the third international conference on solid surfaces. Volume 3
Journal Page Range
p. 1895-1898.

Conference

Title
7. international vacuum congress and 3. international conference on solid surfaces.
Dates
12 - 16 Sep 1977.
Place
Vienna, Austria.