Published 2001 | Version v1
Miscellaneous

Electron distribution function in magnetron discharge

  • 1. Faculty of Physics, Al. I. Cuza University, RO-6600 Iasi (Romania)

Description

Experimental results are presented concerning the electron distribution function (EDF) in a planar magnetron discharge with aluminum target and argon gas. The EDF was obtained by Druyvensteyn method using a spherical probe. Axial and radial distributions of the both plasma potential and the EDF were registered. The EDF dependence on discharge current has also been obtained. (authors)

Availability note (English)

Available from author(s) or National Institute for Laser, Plasma and Radiation Physics, PO Box MG-36, RO-76911 Bucharest-Magurele (RO)
Part of:
XI- th Conference on Plasma Physics and Applications

Additional details

Publishing Information

Publisher
National Institute for Laser, Plasma and Radiation Physics
Imprint Place
Constanta (Romania)
Imprint Title
XI- th Conference on Plasma Physics and Applications
Imprint Pagination
229 p.
Journal Page Range
p. 103-106

Conference

Title
11. conference on plasma physics and applications
Dates
6-8 Sep 2001
Place
Constanta (Romania)

INIS

Optional Information

Notes
12 refs., 4 figs.