Published 2001
| Version v1
Miscellaneous
Electron distribution function in magnetron discharge
- 1. Faculty of Physics, Al. I. Cuza University, RO-6600 Iasi (Romania)
Description
Experimental results are presented concerning the electron distribution function (EDF) in a planar magnetron discharge with aluminum target and argon gas. The EDF was obtained by Druyvensteyn method using a spherical probe. Axial and radial distributions of the both plasma potential and the EDF were registered. The EDF dependence on discharge current has also been obtained. (authors)
Availability note (English)
Available from author(s) or National Institute for Laser, Plasma and Radiation Physics, PO Box MG-36, RO-76911 Bucharest-Magurele (RO)Additional details
Publishing Information
- Publisher
- National Institute for Laser, Plasma and Radiation Physics
- Imprint Place
- Constanta (Romania)
- Imprint Title
- XI- th Conference on Plasma Physics and Applications
- Imprint Pagination
- 229 p.
- Journal Page Range
- p. 103-106
Conference
- Title
- 11. conference on plasma physics and applications
- Dates
- 6-8 Sep 2001
- Place
- Constanta (Romania)
INIS
- Country of Publication
- Romania
- Country of Input or Organization
- Romania
- INIS RN
- 33038894
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- ALUMINIUM; ARGON; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRONS; MAGNETRONS; OPEN PLASMA DEVICES; PLASMA POTENTIAL; SPATIAL DISTRIBUTION; TARGETS
- Descriptors DEC
- DISTRIBUTION; ELECTRIC POTENTIAL; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTARY PARTICLES; ELEMENTS; EQUIPMENT; FERMIONS; FLUIDS; FUNCTIONS; GASES; LEPTONS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; RARE GASES; THERMONUCLEAR DEVICES
Optional Information
- Notes
- 12 refs., 4 figs.