Published 2003 | Version v1
Miscellaneous Open

Dependence of graphite sputtering coefficient on angle of incidence of nitrogen ions

  • 1. Srednyaya Shkola nom. 767, Moscow (Russian Federation)

Description

no abstract available

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Part of:
Abstracts of reports of the 33. International conference on physics of charged particle - crystal interaction

Additional details

Additional titles

Original title (Russian)
Зависимост' коэффициента распыления графита от угла падения ионов азота

Publishing Information

Publisher
Izdatel'stvo UNTs DO
Imprint Place
Moscow (Russian Federation)
Imprint Title
Abstracts of reports of the 33. International conference on physics of charged particle - crystal interaction
Imprint Pagination
162 p.
Journal Page Range
p. 86
Report number
INIS-RU--484

Conference

Title
33. International conference on physics of charged particle - crystal interaction
Original Conference Title
33. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
26-28 May 2003
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
36016262
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ANGULAR DISTRIBUTION; ARGON IONS; DISTRIBUTION FUNCTIONS; ENERGY DEPENDENCE; GRAPHITE; INTEGRAL EQUATIONS; ION BEAMS; SPUTTERING
Descriptors DEC
BEAMS; CARBON; CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; EQUATIONS; FUNCTIONS; IONS; MINERALS; NONMETALS

Optional Information

Notes
4 refs. Imprint:Tezisy dokladov 33. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami