Published January 1979
| Version v1
Journal article
Simple, high current, antimony ion source
Creators
- 1. Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Tokai, Ibaraki-ken, 319-11, Japan
Description
A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 μA at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6 x 10-4 Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8 x 10-9 and 1.8 x 1011 cm-3, respectively
Additional details
Publishing Information
- Journal Title
- Rev. Sci. Instrum.
- Journal Volume
- 50
- Journal Issue
- 1
- Series
- Rev. Sci. Instrum.
- Journal Page Range
- 84-85
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 10446547
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ANTIMONY IONS; ELECTRIC DISCHARGES; ION DENSITY; ION SOURCES; MICRO AMP BEAM CURRENTS; SPECIFICATIONS
- Descriptors DEC
- ATOMIC IONS; BEAM CURRENTS; CHARGED PARTICLES; CURRENTS; IONS