Published January 1979 | Version v1
Journal article

Simple, high current, antimony ion source

Creators

  • 1. Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Tokai, Ibaraki-ken, 319-11, Japan

Description

A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 μA at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6 x 10-4 Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8 x 10-9 and 1.8 x 1011 cm-3, respectively

Additional details

Publishing Information

Journal Title
Rev. Sci. Instrum.
Journal Volume
50
Journal Issue
1
Series
Rev. Sci. Instrum.
Journal Page Range
84-85

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
10446547
Subject category
S74: ATOMIC AND MOLECULAR PHYSICS;
Descriptors DEI
ANTIMONY IONS; ELECTRIC DISCHARGES; ION DENSITY; ION SOURCES; MICRO AMP BEAM CURRENTS; SPECIFICATIONS
Descriptors DEC
ATOMIC IONS; BEAM CURRENTS; CHARGED PARTICLES; CURRENTS; IONS