A critical evaluation of quantitative and qualitative analysis by means of energy-dispersive X-ray measurement in a scanning electron microscope

The bombardment of solids in the scanning electron microscope (SEM) by means of energetic electrons results in the generation and emission of various signals that carry information about the characteristics of the target. Those signals which are related to the present context, e.g. the secondary and backscattered electrons as well as the characteristic and continuous X-radiation, are discussed. The brief description of the SEM and the energy dispersive X-ray (EDX) spectrometer is followed by a discussion of various obstacles affecting the reliability of X-ray intensity measurements and data reduction procedures. The observed relative X-ray intensities from pure elements were determined as a function of the atomic number. These functional dependence curves, which were established under standard conditions, served as reliable reference data for the purpose of quantitative corrections. The performance limits of a typical SEM-EDX analytical system were assessed by analysing quantitatively various types of standard reference materials and inhomogeneous samples. A brief discussion of the X-ray source is given in order to estimate whether the recorded X-ray intensities are representative of the electron bombarded areas. This is of importance when microanalyses are performed on inclusions or near phase boundaries. The use of oxide glasses which are suitable to evaluate and interrelative SEM-EDX systems is discussed. The analysis of metal alloys, which developed exaggerated surface topography when sputtered in an ion microprobe mass analyser or glow discharge lamp, is presented as a typical example for the investigation of rough-surface samples