Published May 1990
| Version v1
Journal article
Resputtering effect on Y1Ba2Cu3O7-d thin films prepared by rf-magnetron sputtering
Creators
- 1. Nippondenso Co. Ltd., Kariya, Aichi (Japan)
Description
Y1Ba2Cu3O7-d thin films were prepared on MgO(001) substrates by rf-magnetron sputtering. The influence of oxygen partial pressure on film preparation has been investigated quantitatively. The oxygen flow rate near the substrate was controlled by an oxygen inlet ring. As-deposited films in an appropriate condition of oxygen flow rate show a superconducting transition at 83 K. When too much oxygen gas is introduced into a chamber, as-deposited films are damaged by resputtering and their superconducting property disappears. The growth mechanism of the thin films is discussed in terms of the resputtering effect. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics, Part 2
- Journal Volume
- 29
- Journal Issue
- 5
- Series
- Jpn. J. Appl. Phys., Part 2.
- Journal Page Range
- L782-L784
- ISSN
- 0021-4922
- CODEN
- JAPLD
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 21084596
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- BARIUM OXIDES; COPPER OXIDES; ELECTRIC CONDUCTIVITY; EMISSION SPECTROSCOPY; MAGNETRONS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUPERCONDUCTING FILMS; TEMPERATURE DEPENDENCE; THIN FILMS; X-RAY DIFFRACTION; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; COPPER COMPOUNDS; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SPECTROSCOPY; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS