Published 1990 | Version v1
Report

The influence of different factors on sputtering of metallic alloys under ion bombardment

  • 1. Moskovskij Inst. Ehlektronnogo Mashinostroeniya, Moscow (Russian Federation)
  • 2. Vsesoyuznyj Nauchno-Issledovatel'skij Inst. Materialov Ehlektronnoj Tekhniki, Kaluga (Russian Federation)

Description

The influence of different factors - redeposition, surface oxidation and target geometry - on ion sputtering of metallic alloys is considered. It was found that considerable reduction of sputtering rate in aluminium-lithium alloys is caused by the effect of continuous reconstruction of protecting lithium layer. The results are interpreted in terms of both Gibbsian and radiation-induced segregation effects. 5 refs.; 4 figs. (author)

Part of:
Radiation materials science. V. 6

Additional details

Additional titles

Original title (Russian)
Влияние различных факторов на распыляемост' металлических сплавов при ионной бомбардировке

Publishing Information

Imprint Title
Radiation materials science. V. 6
Imprint Pagination
218 p.
Journal Page Range
p. 178-183.
Report number
INIS-mf--13545

Conference

Title
International conference on radiation materials science.
Original Conference Title
Mezhdunarodnaya konferentsiya po radiatsionnomu materialovedeniyu
Dates
22-25 May 1990.
Place
Alushta (Ukraine).

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
24052904
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM BASE ALLOYS; HELIUM IONS; ION IMPLANTATION; LAYERS; LITHIUM ALLOYS; MICROSTRUCTURE; PHYSICAL RADIATION EFFECTS; SEGREGATION; SPUTTERING
Descriptors DEC
ALLOYS; ALUMINIUM ALLOYS; CHARGED PARTICLES; CRYSTAL STRUCTURE; IONS; RADIATION EFFECTS

Optional Information

Notes
Imprint:Radiatsionnoe materialovedenie. Tom 6.