Correlation between particle removal and shock-wave dynamics in the laser shock cleaning process
- 1. Laser Engineering Group, IMT Co. Ltd., 449-860 (Korea, Republic of)
- 2. Department of Mechanical Engineering, POSTECH, Pohang, 790-784 (Korea, Republic of)
Description
It has been shown that the laser shock cleaning (LSC) method is effective for eliminating micron- and submicron-scale particulates from solid surfaces. In the LSC process, a high-power laser pulse induces optical breakdown of the ambient gas close to the solid surface to be cleaned and the subsequently-created shock wave followed by a high-speed flow stream detaches the particles. Therefore, there should be a strong correlation between the dynamics of the shock wave and the cleaning performance. In this work, experimental analyses are conducted to measure the cleaning performance using micron-sized alumina particles attached to a silicon surface. The experimental data showing the particle-removal performance are compared with the results of the dynamics of the laser-induced shock waves, leading to a simple model for particle removal by the LSC scheme in the continuum-flow regime
Additional details
Identifiers
- DOI
- 10.1063/1.1857056;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 97
- Journal Issue
- 5
- Journal Page Range
- p. 054903-054903.6
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36106932
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ALUMINIUM OXIDES; CORRELATIONS; EXPERIMENTAL DATA; KNUDSEN FLOW; PARTICLE SIZE; PARTICULATES; PERFORMANCE; PULSES; SHOCK WAVES; SILICON; SOLIDS; SURFACE CLEANING
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; CLEANING; DATA; ELEMENTS; FLUID FLOW; GAS FLOW; INFORMATION; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; PARTICLES; SEMIMETALS; SIZE; SURFACE FINISHING
Optional Information
- Notes
- (c) 2005 American Institute of Physics