Published 1993 | Version v1
Report Metadata-only

Application of radiation damages in semiconductors - processing

Creators

  • 1. Ceske Vysoke Uceni Technicke, Prague (Czech Republic). Fakulta Elektrotechnicka
  • 2. Ceske Vysoke Uceni Technicke, Prague (Czech Republic). Fakulta Jaderna a Fysikalne Inzenyrska
  • 3. Ceskoslovenska Akademie Ved, Prague (Czech Republic). Fyzikalni Ustav

Description

Short communication. 1 fig., 7 refs

Part of:
Workshop 93. Part A

Additional details

Publishing Information

Imprint Title
Workshop 93. Part A
Imprint Pagination
214 p.
Journal Page Range
p. 31-32.
Report number
INIS-mf--14676

Conference

Title
2. annual Czech Technical University seminar Workshop 93.
Dates
18-21 Jan 1993.
Place
Prague (Czech Republic).

INIS

Country of Publication
Czech Republic
Country of Input or Organization
Czech Republic
INIS RN
27007697
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ION IMPLANTATION; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR DEVICES; VACANCIES
Descriptors DEC
CRYSTAL DEFECTS; CRYSTAL STRUCTURE; POINT DEFECTS; RADIATION EFFECTS

Optional Information