Application of fundamental parameter technique to XRF thickness gauge

Fundamental parameter method is applied to XRF plating thickness gauge which utilize a proportional counter as an energy dispersive detector. Correction methods such as background subtraction, peak deconvolution and utilization of secondary filter are developed to derive pure fluorescent X-ray intensities of elements from poor energy resolution spectrum. Several alloy and multilayer platings such as Sn-Pb/Ni/Ag/ceramics, Sn-Pb/Ni/Cu and Zn-Ni/Fe, which are difficult to measure with conventional calibration curve method, are measured with this method successfully with practically acceptable precision. (author)