Design and fabrication of RSFQ cell library for middle-scale applications

We present the development of a rapid single flux quantum (RSFQ) standard cell library for middle-scale applications. The library includes elementary cells frequently used to build large circuit blocks. The standard cells were designed for a simple process with 8 mask levels. The circuits were optimized and laid out to minimize effects of high parasitic inductance associated with a single ground plane layer. Circuit parameters on the wafer were determined by electrical measurements on parametric test circuits, which gave feedback on the design and process. All cells were individually fabricated and tested, and the design and layout were confirmed