Published July 1980
| Version v1
Journal article
Effect of increasing electron elastic scattering on ion self-implantation
Creators
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Эффект возрастания упругого рассеяния электронов при ионной автоимплантации
Publishing Information
- Journal Title
- Pis'ma Zh. Tekh. Fiz.
- Journal Volume
- 6
- Journal Issue
- 13
- Series
- Pis'ma Zh. Tekh. Fiz.
- Journal Page Range
- 794-795
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 12606094
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- COPPER; COPPER IONS; ELASTIC SCATTERING; ELECTRONS; ENERGY DEPENDENCE; ION IMPLANTATION; MEV RANGE 01-10
- Descriptors DEC
- ATOMIC IONS; CHARGED PARTICLES; ELEMENTARY PARTICLES; ELEMENTS; ENERGY RANGE; FERMIONS; IONS; LEPTONS; METALS; MEV RANGE; SCATTERING; TRANSITION ELEMENTS
Optional Information
- Notes
- Short note; for English translation see the journal Soviet Technical Physics Letters (USA).