Published August 1, 2005 | Version v1
Journal article

Dust void formation above rectangular and circular potential traps in an rf plasma

  • 1. Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven (Netherlands)

Description

Void formation in one- and two-dimensional complex (dusty) radio frequency (rf) plasmas has been studied using spherical and cylindrically shaped particles. Threshold values for void formation have been determined for plasma power, pressure and number of particles. A comparison between an electropositive argon and an electronegative oxygen plasma shows that void formation in electronegative plasmas is hindered because of a better radial confinement of the particle cloud. No significant dependence on the particle shape (spherical versus cylindrical) has been observed. Comparing one- and two-dimensional structures shows that collective particle behaviour is not responsible for void formation, but possibly does contribute to cloud confinement

Availability note (English)

Available online at http://stacks.iop.org/0963-0252/14/509/psst5_3_013.pdf or at the Web site for the journal Plasma Sources Science and Technology (ISSN 1361-6595) http://www.iop.org/

Additional details

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
14
Journal Issue
3
Journal Page Range
p. 509-516
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36109508
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ARGON; COMPARATIVE EVALUATIONS; DUSTS; HIGH-FREQUENCY DISCHARGES; OXYGEN; PLASMA; PLASMA CONFINEMENT; VOIDS
Descriptors DEC
CONFINEMENT; ELECTRIC DISCHARGES; ELEMENTS; EVALUATION; FLUIDS; GASES; NONMETALS; RARE GASES