Angular distribution of sputtered alloy. Experimental and simulated study

Angular distribution of Cu and Be atoms sputtered from Cu98 Be2 alloy under 5 Kr+ ion bombardment were measured at different angle of incidences (0, 30, 70 and 80 degrees). The sputtered material is collected on a Mylar(TM) foil surrounding the target. The used collector was mounted at different ejection angles and analyzed by inductively coupled plasma optical emission spectroscopy (ICP-OES). The SRIM-code program was employed to obtain the sputtering yield of Cu and Be from simulated Cu98 Be2 target. The experiment was combined with simulations and revealed that both of them were in a fairly good agreement. Furthermore, angular distribution of differential sputtering yields of both Cu and Be showed over-cosine tendency. (author)