Published 2019
| Version v1
Book
Evaluation of combination light scattering and Rutherford backscattering by example of defect generation in silicon
Creators
- 1. NIIYaF MGU im. M.V. Lomonosova, Moscow (Russian Federation)
- 2. MGU im. M.V. Lomonosova, Fizicheskij Fakul'tet, Moscow (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Сравнение комбинационного рассеяния света и резерфордовского обратного рассеяния на примере дефектообразования в кремнии
Publishing Information
- Publisher
- KDU, Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 978-5-91304-894-3
- Imprint Title
- Summaries of reports of XLIX International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 218 p.
- Journal Page Range
- p. 22
Conference
- Title
- 49. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLIX mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2019
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 52087279
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ARGON IONS; COMPARATIVE EVALUATIONS; CRYSTAL DEFECTS; DEPTH; EXPERIMENTAL DATA; ION BEAMS; KEV RANGE 10-100; MONOCRYSTALS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; DATA; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; EVALUATION; INFORMATION; IONS; KEV RANGE; LASER SPECTROSCOPY; NUMERICAL DATA; SEMIMETALS; SPECTROSCOPY
Optional Information
- Notes
- Imprint:Tezisy dokladov XLIX mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami