Published 1995 | Version v1
Miscellaneous Open

Electrical characterization of magnesium and tellurium implanted InxGa1-xAs

  • 1. Sematech, Austin, Texas, (United States)
  • 2. Surrey Univ., Guildford (United Kingdom). Dept. of Electronic and Electrical Engineering

Description

Short communication

Files

28072879.pdf

Files (22.4 kB)

Name Size Download all
md5:bb4c0d052501ed0091e64d4d0eea3985
22.4 kB Preview Download
Part of:
Ninth international conference on ion beam modification of materials. Book of abstracts

Additional details

Publishing Information

Publisher
Accademic Press.
Imprint Title
Ninth international conference on ion beam modification of materials. Book of abstracts
Imprint Pagination
452 p.
Journal Page Range
p. 10078.
Report number
INIS-AU--0004

Conference

Title
9. international conference on ion beam modification of materials.
Acronym
IBMM'95
Dates
5-10 Feb 1995.
Place
Canberra (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
28072879
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ELECTRICAL PROPERTIES; GALLIUM ARSENIDES; HALL EFFECT; INDIUM COMPOUNDS; ION IMPLANTATION; ION MOBILITY; MAGNESIUM IONS; TELLURIUM IONS
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; CHARGED PARTICLES; GALLIUM COMPOUNDS; IONS; MOBILITY; PARTICLE MOBILITY; PHYSICAL PROPERTIES; PNICTIDES

Optional Information