Published August 15, 2000
| Version v1
Journal article
Pattern generators and microcolumns for ion beam lithography
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Journal Volume
- 18
- Journal Issue
- 6
- Journal Page Range
- [10 p.]
- ISSN
- 0734-211X
- CODEN
- JVTBD9
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 33063888
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ETCHING; FABRICATION; ION BEAMS; MASKING; MICROELECTRONIC CIRCUITS
- Descriptors DEC
- BEAMS; ELECTRONIC CIRCUITS; SURFACE FINISHING
Optional Information
- Contract/Grant/Project number
- AC03-76SF00098
- Notes
- Journal Publication Date: Nov-Dec 2000
- Funding organization
- USDOE Director, Office of Science (United States)
- Secondary number(s)
- LBNL--45034