Published 1996 | Version v1
Miscellaneous Open

Energetic optimization of an RF sputtering system

  • 1. Khar'kovskij Gosudarstvennyj Univ., Kharkov (Ukraine)
  • 2. Gosudarstvennyj Komitet po Ispol'zovaniyu Atomnoj Ehnergii SSSR, Moscow (Russian Federation). Inst. Atomnoj Ehnergii

Description

no abstract available

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Part of:
Abstracts of the 23rd European physical society conference on controlled fusion and plasma physics

Additional details

Publishing Information

Imprint Title
Abstracts of the 23rd European physical society conference on controlled fussion and plasma physics
Imprint Pagination
488 p.
Journal Page Range
p. 451
Report number
INIS-UA--043

Conference

Title
23. European physical society conference on controlled fusion and plasma physics.
Dates
24-28 Jun 1996
Place
Kiyev (Ukraine)

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
30029801
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ION SOURCES; OPTIMIZATION; RF SYSTEMS

Optional Information