Published 1996
| Version v1
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Energetic optimization of an RF sputtering system
- 1. Khar'kovskij Gosudarstvennyj Univ., Kharkov (Ukraine)
- 2. Gosudarstvennyj Komitet po Ispol'zovaniyu Atomnoj Ehnergii SSSR, Moscow (Russian Federation). Inst. Atomnoj Ehnergii
Description
no abstract available
Files
30029801.pdf
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Additional details
Publishing Information
- Imprint Title
- Abstracts of the 23rd European physical society conference on controlled fussion and plasma physics
- Imprint Pagination
- 488 p.
- Journal Page Range
- p. 451
- Report number
- INIS-UA--043
Conference
- Title
- 23. European physical society conference on controlled fusion and plasma physics.
- Dates
- 24-28 Jun 1996
- Place
- Kiyev (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 30029801
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ION SOURCES; OPTIMIZATION; RF SYSTEMS