Fabrication of a microreactor by proton beam writing technique

Microreactors are innovative and promising tools in technology nowadays because of their advantages compared to the conventional-scale reactors. These advantages include vast improvements in surface to volume ratio, energy efficiency, reaction speed and yield and increased control of reaction conditions, to name a few examples. The high resolution capability of the micromachining technique utilizing accelerated ion beams in the fabrication technology of microreactors has not yet been taken advantage of. In this work we present the design of a prototype micro-electrochemical cell of 1.5 μL volume (2.5 x 2.5 x 0.240 mm) created with a 3 MeV proton microbeam. The cell can be separated into two half-cells with a suitable membrane applicable to galvanic or fuel cells as well. We deposited gold electrodes on both of the half-cells. The operability of the device was demonstrated by electric current flow between the two electrodes in this micro-electrochemical cell containing a simple electrolyte solution. We used a polycapillary film to separate the two half-cells, hindering the mixing of the anolyte and catholyte solutions. As a result of the minimal mixing caused by the polycapillary film, this cell design can be suitable for electro-synthesis. Due to the high resolution of proton beam writing, it is planned to reduce the dimensions of this kind of microreactor.