Published July 12, 2001
| Version v1
Journal article
The extraction of small cluster ions from cesium sputtering ion source
- 1. Department of Physics, and Texas Center for Superconductivity, University of Houston, Houston, Texas 77204 (United States)
Description
We found that the Cesium Sputtering Ion Source is suitable to deliver small cluster ions. We obtained the record beam current for carbon cluster ions Cn with n=1 up to 10. The beam current for C2, C5, and C10 was 70.7μA, 1.29μA, and 116 nA respectively. The negative cluster ions of extraction Bn, Sin, and Gen and their applications are also reported
Additional details
Identifiers
- DOI
- 10.1063/1.1395475;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 576
- Journal Issue
- 1
- Journal Page Range
- p. 1007-1010
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 16. international conference on the application of accelerators in research and industry
- Acronym
- CAARI 2000
- Dates
- 1-4 Nov 2000
- Place
- Denton, TX (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35090805
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ATOMIC CLUSTERS; BEAM CURRENTS; BORON; CARBON; CESIUM; GERMANIUM; ION BEAMS; ION SOURCES; SILICON; SPUTTERING
- Descriptors DEC
- ALKALI METALS; BEAMS; CURRENTS; ELEMENTS; METALS; NONMETALS; SEMIMETALS
Optional Information
- Notes
- (c) 2001 American Institute of Physics.