Published November 1993 | Version v1
Journal article

Measurement of tunnel junction resistance during formation

  • 1. San Francisco State Univ., CA (United States)

Description

The authors have measured the characteristics of aluminum tunnel junctions during and immediately after the formation of the junction. This has permitted us to observe changes in the oxide barrier, in vacuum and in air. By observing the barrier resistance during sputtering, they were able to diagnose and correct problems due to plasma discharges which were damaging the junctions. They report preliminary results from junctions passivated with a silicon nitride cap layer

Additional details

Publishing Information

Journal Title
Journal of Low Temperature Physics
Journal Volume
93
Journal Issue
3-4
Journal Page Range
p. 599-604.
ISSN
0022-2291
CODEN
JLTPAC

Conference

Title
5. international workshop on low temperature detectors.
Dates
29 Jul - 3 Aug 1993.
Place
Berkeley, CA (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
25040613
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM; ELECTRIC CONDUCTIVITY; FABRICATION; JUNCTION DETECTORS; SUPERCONDUCTING JUNCTIONS
Descriptors DEC
ELECTRICAL PROPERTIES; ELEMENTS; MEASURING INSTRUMENTS; METALS; PHYSICAL PROPERTIES; RADIATION DETECTORS; SEMICONDUCTOR DETECTORS

Optional Information

Secondary number(s)
CONF-930751--.