Multicomponent crystal surface erosion under ion bombardment

The evolution of surface erosion under ion bombardment versus ion doses is studied by the vacuum decoration method. The stationary stage of the surface profile is not observed in the investigated dose range (1011-8x1018 ion cm-2). The surface roughness steadily increases due to the statistical incorporation of surface defects and inhomogeneities produced at preceding stages. The development of the surface profile is influenced by the ''self-contamination'' of the material by one of the components sputtered from the edges of the surface steps and selectively collected in the outer surface layers