Published 2002 | Version v1
Miscellaneous

LIGA technique and application at BSRF

  • 1. Chinese Academy of Sciences, Beijing (China). Inst. of High Energy Physics

Description

LIGA technique is a complex and hard-holding process to make the microstructure because it covers large areas and many fields. Under hard effort for many years, the whole LIGA process has been set up at BSRF, and the process level has been progressed rapidly, moreover, some applications in important fields have been formed. LIGA technique must have a great prospect in China

Part of:
BSRF 2001 activity report

Additional details

Additional titles

Augmented title (English)
The BSRF is stated for Beijing Synchrotron Radiation Facility

Publishing Information

Publisher
Institute of High Energy Physics
Imprint Place
Beijing (China)
Imprint Title
BSRF 2001 activity report
Imprint Pagination
170 p.
Journal Page Range
p. 147-148

Optional Information