Published September 1993 | Version v1
Journal article

Energy dependence of selective coefficients of secondary emission and sputtering of dielectric monocrystals

  • 1. Moscow Engineering Physics Inst. (Russian Federation)

Description

Short communication

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
44
Journal Issue
9
Journal Page Range
p. 960.
ISSN
0042-207X
CODEN
VACUAV

Conference

Title
10. all-union conference on the interaction of ions with surfaces.
Dates
3-6 Sep 1991.
Place
Zvenigorod (Russian Federation).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
25001696
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DIELECTRIC MATERIALS; ENERGY DEPENDENCE; ION EMISSION; ION-ATOM COLLISIONS; SECONDARY EMISSION; SILICON OXIDES; SPUTTERING
Descriptors DEC
ATOM COLLISIONS; CHALCOGENIDES; COLLISIONS; EMISSION; ION COLLISIONS; MATERIALS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS