Published April 1990 | Version v1
Journal article Metadata-only

Electron channeling investigation of near the surface layers of single crystals with Auger electron spectroscopy

Creators

  • 1. Gosudarstvennyj Komitet po Ispol'zovaniyu Atomnoj Ehnergii SSSR, Moscow (USSR). Inst. Atomnoj Ehnergii

Description

A new method for determination of atoms distribution in near-the surface region (to depth of ≤200 A) is proposed for perfect single crystals based (Ep≤100keV) depth modulated due to channeling. The determination of traces atoms concentration with respect to the position within the crystal lattice needs solving of two coupled systems of linear equations. It is assumed that trace atoms do not form clusters and are positioned either in lattice sites or interstitials

Additional details

Additional titles

Original title (Russian)
Исследование приповерхностных слоев монокристаллов с помощья Оже-спектроскопии в условиях каналирования

Publishing Information

Journal Title
Poverkhnost': Fizika, Khimiya, Mekhanika
Journal Issue
no.4
Series
Poverkhn.: Fiz., Khim., Mekh.
CODEN
PFKMD

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
22059485
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAMS; ION IMPLANTATION; KEV RANGE 10-100; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; SILICON; SURFACE PROPERTIES; SURFACES
Descriptors DEC
BEAMS; CRYSTALS; ELECTRON SPECTROSCOPY; ELEMENTS; ENERGY RANGE; KEV RANGE; LEPTON BEAMS; PARTICLE BEAMS; RADIATION EFFECTS; SEMIMETALS; SPECTROSCOPY