Published March 2004
| Version v1
Journal article
Influence of external magnetic field on anomalous skin effects in inductively coupled plasmas
Creators
- 1. Dalian Univ. of Technology, Dalian (China). Dept. of Physics, The State Key Laboratory of Materials Modification
Description
Using a one-dimensional slab model, authors study the influence of the external static magnetic field on the anomalous skin effects in the inductively coupled plasma. The rf electromagnetic field in the plasma is determined by solving the linearized Boltzmann equation incorporating with the Maxwell equations. The numerical results show that, due to the existence of the external magnetic field, the anomalous skin effects are greatly enhanced and the number of regions with negative absorption is decreased
Additional details
Publishing Information
- Journal Title
- Chinese Physics Letters
- Journal Volume
- 21
- Journal Issue
- 3
- Journal Page Range
- p. 511-513
- ISSN
- 0256-307X
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 36063632
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- ABSORPTION; BOLTZMANN EQUATION; ELECTROMAGNETIC FIELDS; MAGNETIC FIELDS; MAXWELL EQUATIONS; NUMERICAL SOLUTION; PLASMA; RF SYSTEMS; SKIN EFFECT
- Descriptors DEC
- DIFFERENTIAL EQUATIONS; EQUATIONS; INTEGRO-DIFFERENTIAL EQUATIONS; KINETIC EQUATIONS; MATHEMATICAL SOLUTIONS; PARTIAL DIFFERENTIAL EQUATIONS; SORPTION