Published June 2004 | Version v1
Miscellaneous Open

Synchrotron X-ray diffraction studies of silicon implanted with deuterium ions after high pressure thermal annealing

  • 1. Institute of Atomic Energy, Otwock-Swierk (Poland)
  • 2. Institute of Electronic Materials Technology, Warsaw (Poland)
  • 3. HASYLAB at Desy, Hamburg (Germany)
  • 4. Institute of Electron Technology, Warsaw (Poland)

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Part of:
Annual Report 2003 of the Institute of Atomic Energy

Additional details

Publishing Information

Imprint Title
Annual Report 2003 of the Institute of Atomic Energy
Imprint Pagination
173 p.
Journal Page Range
p. 98-99
ISSN
1507-5478
Report number
INIS-PL--2005-0002

Optional Information

Notes
3 figs