Model operation on the computer of distributions on depth of vacancy nanoclusters in the constructional materials irradiated with ions

Model operation on the computer of distributions on depth of the vacancy nanoclusters in the iron and silicon irradiated with ions of carbon, nitrogen and titanium, etc. is carried out. It is established that concentration of nanoclusters Ck sluggishly increases with increase in depth of material, reaches a maximum and then sharply falls down to zero on the end of a run of an ion. With body height of energy of the flying particle the maximum of a curve decreases and moves on an axis of depths to the right. (authors)