Nanodot deposition and its application with atomic force microscope

Nanodot deposition using atomic force microscope (AFM) is investigated. To realize repeatable and precise deposition of nanodots, the detailed control method is discussed. The electric field between AFM tip and substrate is analyzed, and a convenient method to control tip–substrate separation is proposed. In experiments, two nanodot matrixes are fabricated and the heights of the nanodots are analyzed. Experimental results testify that the control method can lead to repeatable and precise fabrication of deposited nanodots. As an application of deposited nanodots, a carbon nanotube (CNT) is soldered on gold electrodes with deposited Au nanodots. After soldering, the contact resistances between the CNT and the electrodes decrease greatly. AFM-based nanodot deposition can be used to fabricate special nanopatterns; also it can be used to solder nanomaterials on substrates to improve the electrical connection, which has a promising future for nanodevice fabrication.