Published September 1978 | Version v1
Journal article

Surface analysis of sputtered stainless steel

  • 1. Sandia Labs., Livermore, CA (USA)

Description

The behaviour of 316 stainless steel during sputtering by Ar and H ions in the temperature range 25-5000C was studied by the situ surface analysis using a scanning electron micrscope and Auger electron spectroscopy. The main differences between Ar and H sputtering are in the sputtering rates and in the relative amounts of surface impurities. Similar development of surface topography occurred during Ar and H sputtering. A lower limit to the H dose required to sputter through the impurity layers on stainless steel was obtained. (Auth.)

Additional details

Publishing Information

Journal Title
J. Nucl. Mater.
Journal Volume
76-77
Series
J. Nucl. Mater.
Journal Page Range
183-187
ISSN
0022-3115

Conference

Title
3. international conference on plasma surface interactions in controlled fusion devices.
Dates
3 - 7 Apr 1978.
Place
Abingdon, UK.