Probing dielectric ceramics surface at sub-micrometer scale
- 1. Istituto per la Microelettronica e Microsistemi, Consiglio Nazionale delle Ricerche, Stradale Primosole 50, 95121 Catania (Italy)
- 2. Department of Engineering Materials, Sir Robert Hadfield Building, University of Sheffield, Mappin Street, Sheffield, S1 3JD (United Kingdom)
Description
Scanning probe microscopy (SPM) with conductive tips has been used to image the dielectric properties of ceramics with giant permittivity. In particular, measurements in impedance mode of local resistivity allowed to image the permittivity map on polycrystalline materials. Such imaging provides correlation between the dielectric properties and the sample structure, in particular focusing on defects inside the single grains. Great attention has been devoted to the possible artefacts due to surface imperfections, such as huge roughness and/or contamination. A reliable surface investigation has been obtained after the definition of both the physical and geometrical criteria to avoid the artefacts due to both the surface or anomalous tip-sample contact area variation (for instance, in grain boundaries, holes and cracks in the ceramic pills). In particular, the power spectral density (PSD) allows to get access to the different periodic components of the surface roughness. The PSD demonstrated to be a sensitive tool to check the surface conditions after the polishing procedures aimed to the progressive decreasing of surface roughness, in order to reach the SPM limits and to avoid artefacts inducing wrong data interpretation.
Availability note (English)
Available from http://dx.doi.org/10.1088/1757-899X/8/1/012038Additional details
Identifiers
Publishing Information
- Journal Title
- IOP Conference Series. Materials Science and Engineering (Online)
- Journal Volume
- 8
- Journal Issue
- 1
- Journal Page Range
- [4 p.]
- ISSN
- 1757-899X
Conference
- Title
- Symposium G - Fundamentals and technology of multifunctional oxide thin films
- Acronym
- E-MRS 2009 spring meeting
- Dates
- 8-12 Jun 2009
- Place
- Strasbourg (France)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43019043
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CERAMICS; CONTAMINATION; DEFECTS; DIELECTRIC MATERIALS; GRAIN BOUNDARIES; IMAGES; MICROSCOPY; PERMITTIVITY; POLYCRYSTALS; ROUGHNESS; SPECTRAL DENSITY; SURFACES
- Descriptors DEC
- CRYSTALS; DIELECTRIC PROPERTIES; ELECTRICAL PROPERTIES; FUNCTIONS; MATERIALS; MICROSTRUCTURE; PHYSICAL PROPERTIES; SPECTRAL FUNCTIONS; SURFACE PROPERTIES