Published February 2010 | Version v1
Journal article

Probing dielectric ceramics surface at sub-micrometer scale

  • 1. Istituto per la Microelettronica e Microsistemi, Consiglio Nazionale delle Ricerche, Stradale Primosole 50, 95121 Catania (Italy)
  • 2. Department of Engineering Materials, Sir Robert Hadfield Building, University of Sheffield, Mappin Street, Sheffield, S1 3JD (United Kingdom)

Description

Scanning probe microscopy (SPM) with conductive tips has been used to image the dielectric properties of ceramics with giant permittivity. In particular, measurements in impedance mode of local resistivity allowed to image the permittivity map on polycrystalline materials. Such imaging provides correlation between the dielectric properties and the sample structure, in particular focusing on defects inside the single grains. Great attention has been devoted to the possible artefacts due to surface imperfections, such as huge roughness and/or contamination. A reliable surface investigation has been obtained after the definition of both the physical and geometrical criteria to avoid the artefacts due to both the surface or anomalous tip-sample contact area variation (for instance, in grain boundaries, holes and cracks in the ceramic pills). In particular, the power spectral density (PSD) allows to get access to the different periodic components of the surface roughness. The PSD demonstrated to be a sensitive tool to check the surface conditions after the polishing procedures aimed to the progressive decreasing of surface roughness, in order to reach the SPM limits and to avoid artefacts inducing wrong data interpretation.

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/8/1/012038

Additional details

Identifiers

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
8
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1757-899X

Conference

Title
Symposium G - Fundamentals and technology of multifunctional oxide thin films
Acronym
E-MRS 2009 spring meeting
Dates
8-12 Jun 2009
Place
Strasbourg (France)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43019043
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CERAMICS; CONTAMINATION; DEFECTS; DIELECTRIC MATERIALS; GRAIN BOUNDARIES; IMAGES; MICROSCOPY; PERMITTIVITY; POLYCRYSTALS; ROUGHNESS; SPECTRAL DENSITY; SURFACES
Descriptors DEC
CRYSTALS; DIELECTRIC PROPERTIES; ELECTRICAL PROPERTIES; FUNCTIONS; MATERIALS; MICROSTRUCTURE; PHYSICAL PROPERTIES; SPECTRAL FUNCTIONS; SURFACE PROPERTIES