Published February 1995 | Version v1
Journal article Metadata-only

Diffractive efficiency study of soft X-ray multilayer grating with sub-micron grating period

Creators

  • 1. Academia Sinica, Shanghai, SH (China). Shanghai Inst. of Optics and Fine Mechanics

Description

The theoretical design and experimental fabrication of soft X-ray multilayer laminar phase grating are described briefly. The measurement process and results of diffractive efficiency of multilayer laminar phase grating at Beijing Synchrotron Radiation Facility 3B1 beamline are given in detail. The measurement results are analysed and discussed, and compared with the theoretical values

Additional details

Publishing Information

Journal Title
Acta Physica Sinica
Journal Volume
44
Journal Issue
2
Journal Page Range
p. 184-188.
ISSN
1000-3290
CODEN
WLHPAR

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
27001901
Subject category
S43: PARTICLE ACCELERATORS;
Descriptors DEI
CHINA; DIFFRACTION GRATINGS; EFFICIENCY; LAYERS; PERFORMANCE TESTING; SOFT X RADIATION; SYNCHROTRON RADIATION SOURCES
Descriptors DEC
ASIA; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATION SOURCES; RADIATIONS; TESTING; X RADIATION