Two-dimensional kinetic and fluid models for parallel-plate RF glow discharges

RF (radio frequency) glow discharges in a parallel plate geometry are traditionally started by a one-dimensional (1D) geometry. Two-dimensional (2D) models are more accurate to provide more realistic pictures of discharges close to the radial wall. In this presentation, 2D fluid and kinetic models will be discussed to illustrate the plasma flow in both radial and actual directions in the reactor. The fluid model is based on three-moment fluid equations and coupled with Poisson's equation. The kinetic models are based on the Boltzmann equation as well as direct Monte Carlo simulation, and coupled with Poisson's equation. These 2D models demonstrate similar behaviors of radial direction transport which causes nonuniform plasma density, higher ionization rate and mean energy in the sheath close to the radial wall. Furthermore, the kinetic model provides the electron angular velocity distribution that clearly indicates that the radial electric field drives the electrons as hard as the actual field in the radial sheath for higher ionization collisions. This study provides a better understanding of rf glow discharges in a practical geometry of reactors