Properties of excitation of the electromagnetic field at high-frequency capacitive discharge

The properties of excitation of the electromagnetic field at high-frequency capacitive discharge have been studied in present article. High frequency capacitive discharges have been widely used in scientific research and technological installations for the past 50 years. The first discharge models considered a capacitive discharge as a capacitor with a complex filling with a dielectric medium. Since the electron density in the space charge layers formed at the plasma - electrode boundaries is low, the dielectric constant of layers was taken to be unity. In turn, the dielectric constant of the plasma at high plasma densities is negative. Therefore, already in the early stages of research, it was theoretically and experimentally shown that at low gas pressures, when the frequency of collisions of electrons with neutrals is much lower than the frequency of the field supporting ionization, capacitive discharges have resonant properties associated with compensation of capacitive impedance of space charge layers and inductive impedance introduced by plasma. (author)