Highly charged ion based time-of-flight emission microscope
Creators
- 1. Lawrence Livermore National Laboratory, University of California, Livermore, California 94551 (United States)
Description
An emission microscope using highly charged ions as the excitation source has been designed, constructed, and operated. A novel ''acorn'' objective lens has been used to simultaneously image electron and secondary ion emission. A resistive anode-position sensitive detector is used to determine the x-y position and time of arrival of the secondary events at the microscope image plane. Contrast in the image can be based on the intensity of the electron emission and/or the presence of particular secondary ions. Spatial resolution of better than 1 μm and mass resolution m/Δm of better than 400 were demonstrated. Background rejection from uncorrelated events of greater than an order of magnitude is also achieved. (c) 2000 American Institute of Physics
Additional details
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 71
- Journal Issue
- 5
- Journal Page Range
- p. 2077-2081
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 32060017
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ELECTRON EMISSION; ELECTRON MICROSCOPES; EXPERIMENTAL DATA; ION EMISSION; ION MICROSCOPES; ION PROBES; PERFORMANCE; SPATIAL RESOLUTION
- Descriptors DEC
- DATA; EMISSION; INFORMATION; MICROSCOPES; NUMERICAL DATA; PROBES; RESOLUTION
- Proposed descriptors and Free-text terms
- secondary ion emission; electron optics