A device for precise alignment of electron beam and sample in the scanning electron microscope

The electron-channelling method provides the scanning electron microscope (SEM) with a powerful technique for determination of crystallographic orientations of both macroscopic and microscopic crystals. However, in using this technique it is necessary to know the relative alignment between the electron beam and the sample. For example, in studies involving crystallisation from the melt or vapour one often needs to determine the crystallographic orientation of the solid relative to the growth direction. Hence, one must align the growth direction either parallel to or at some specific angle to the electron beam. In this letter the authors present details of a specimen-mounting device which allows sample and beam alignment to better than +or-0.07 degrees .