Published June 12, 1975 | Version v1
Patent Open

Method and system for automatically correcting aberrations of a beam of charged particles

Description

The location of a beam of charged particles within a deflection field is determined by its orthogonal deflection voltages. With the location of the beam in the field, correction currents are supplied to a focus coil and to each of a pair of stigmator coils to correct for change of focal length and astigmatism due to the beam being deflected away from the center of its deflection field

Availability note (English)

MF available from INIS under the Report Number.

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Additional details

Additional titles

Original title (Dutch)
Inrichting voor het elimineren van aberraties van een bundel geladen deeltjes

Publishing Information

Imprint Pagination
10 p.
IPC:
Int. Cl. H01j37/21.
IPC
Int. Cl. H01j37/21.
Patent number
NL patent document 7506983/A/

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
7248882
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Descriptors DEI
BEAM OPTICS; BEAM SHAPING; CHARGED PARTICLES; FEEDBACK; FOCUSING; GEOMETRICAL ABERRATIONS

Optional Information

Notes
Priority 26 Jun 1974, USA; 13 figs.