Published March 1, 2021 | Version v1
Journal article Metadata-only

Continuous terahertz wave imaging of microelectronics objects

Creators

  • 1. Radio Electronics Department, Faculty of Radiophysics, National Research Tomsk State University, 36 Lenin Ave., Tomsk, 634050 (Russian Federation)

Description

The results of using a terahertz imaging system for microelectronic flaw detection are presented. The distribution of the transmitted radiation through the plastic leaded chip carrier microchip at frequencies of 206 and 806 GHz is obtained. The possibility of using quasi-optical systems with a continuous terahertz radiation source for microelectronic flaw detection has been evaluated. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1862/1/012030

Additional details

Identifiers

DOI
10.1088/1742-6596/1862/1/012030;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1862
Journal Issue
1
Journal Page Range
[6 p.]
ISSN
1742-6596

Conference

Title
16. International Conference on Electronic Devices and Control Systems
Acronym
EDCS 2020
Dates
18-20 Nov 2020
Place
Tomsk (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
54097209
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DEFECTS; DETECTION; GHZ RANGE; MICROELECTRONICS; OPTICAL SYSTEMS; PLASTICS; RADIATION SOURCES
Descriptors DEC
FREQUENCY RANGE; MATERIALS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; SYNTHETIC MATERIALS