Published October 2001
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Control of the gases flow rate during ion-beam deposition on the oxides basis coating
Description
The results of plasma discharge emissive optical spectrum examination of the ion source on the accelerator with an anode stratum basis are described. The spectral regions for the check of plasma chemical composition are offered. The optimum algorithm of dynamic control of inert and reactive gas flow rates during of different materials oxide films ion-beam deposition is described
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Additional details
Additional titles
- Original title (Russian)
- Управление расходом газов в процессах ионно-лучевого осаждения покрытий на основе оксидов
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 985-445-236-0
- Imprint Title
- Proceedings of the Fourth international conference 'Interaction of radiation with solids'
- Imprint Pagination
- 396 p.
- Journal Page Range
- p. 333-334
- Report number
- INIS-BY--059
Conference
- Title
- 4. international conference 'Interaction of radiation with solids'
- Original Conference Title
- Chetvertaya mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 3-5 Oct 2001
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 32068733
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COATINGS; CONTROL EQUIPMENT; EMISSION SPECTRA; ENERGY BEAM DEPOSITION; ION BEAMS; OXIDES; THIN FILMS
- Descriptors DEC
- BEAMS; CHALCOGENIDES; DEPOSITION; EQUIPMENT; FILMS; OXYGEN COMPOUNDS; SPECTRA; SURFACE COATING
Optional Information
- Notes
- 4 refs., 1 fig. Imprint:Materialy chetvertoj mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'