Field Emission Scanning Electron Microscope (FESEM) Facility in BTI

Field Emission Scanning Electron Microscope (FE-SEM) provides ultra-high resolution imaging at low accelerating voltages and small working distances. The GeminisSEM 500, a new FESEM imaging facility will be installed soon in MTEC, BTI. It provides resolution of the images is as low as 0.6 nm at 15 kV and 1.2 nm at 1 kV, allowing examination of the top surface of nano powders, nano film and nano fiber in the wide range of applications such as mineralogy, ceramics, polymer, metallurgy, electronic devices, chemistry, physics and life sciences. This system is equipped with several detectors to detect various signals such as secondary electrons (SE) detector for topographic information and back-scattered electrons (BSE) detector for materials composition contrast. Energy dispersive x-ray spectroscopy (EDS) with detector energy resolution of < 129 eV and detection limit in the range of 1000-3000 ppm coupled with FE-SEM is used to determine the chemical composition of micro-features including boron (B) to uranium (U). Wavelength dispersive x-ray spectroscopy (WDS) which has detector resolution of 2-20 eV and detection limit of 30-300 ppm coupled with FE-SEM is used to detect elements that cannot be resolved with EDS. The ultra-high resolution imaging combined with the high sensitivity WDS helps to resolve the thorium and rare earth elemental analysis. (author)