Published 2000
| Version v1
Book
Negative Ion Density Measurements in Fluorocarbon ECR Plasma
- 1. Department of Advenced Energy Engineering Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Fukuoka (Japan)
- 2. Tokyo Electron Tohoku Co. Ltd., Kanagawa (Japan)
- 3. Tokyo Electron Co. Ltd., Osaka (Japan)
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Printing Division, Space Research Center, Polish Academy of Sciences, Warsaw, Poland
- Imprint Place
- Warsaw (Poland)
- ISBN
- 83-902319-5-6
- Imprint Title
- 24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 2
- Imprint Pagination
- 230 p.
- Journal Page Range
- p. 31-32
Conference
- Title
- 24 International Conference on Phenomena in Ionized Gases
- Dates
- 11-16 Jul 1999
- Place
- Warsaw (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 33059988
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ARGON; CARBON FLUORIDES; ELECTRON CYCLOTRON-RESONANCE; ELECTRON DENSITY; INTERFEROMETRY; ION DENSITY; LABORATORY EQUIPMENT; LANGMUIR PROBE; MICROWAVE RADIATION; PLASMA
- Descriptors DEC
- CARBON COMPOUNDS; CYCLOTRON RESONANCE; ELECTRIC PROBES; ELECTROMAGNETIC RADIATION; ELEMENTS; EQUIPMENT; FLUIDS; FLUORIDES; FLUORINE COMPOUNDS; GASES; HALIDES; HALOGEN COMPOUNDS; NONMETALS; PROBES; RADIATIONS; RARE GASES; RESONANCE
Optional Information
- Notes
- 7 refs, 3 figs, 1 tab