Published July 15, 2013 | Version v1
Journal article

Improvement of graphene quality synthesized by cluster ion implantation

  • 1. School of Physics and Technology and Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education, Wuhan University, Wuhan 430072 (China)
  • 2. Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875 (China)

Description

Graphene was prepared by negative C4 cluster ion implantation at 5 keV/atom followed by vacuum thermal annealing and cooling. The surface morphology and structure of samples were studied by scanning electron microscopy, atomic force microscopy, and Raman spectroscopy. Improvement of the graphene quality was realized by optimization of the post thermal processes. 1–2 layer graphene was obtained with I2D/IG ratio of 1.43 and ID/IG ratio of 0.07 at the implantation dose of 12 × 1015 atoms/cm2 and annealed at 900 °C followed by cooling at 20 °C/min

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2012.11.075

Additional details

Identifiers

DOI
10.1016/j.nimb.2012.11.075;
PII
S0168-583X(13)00087-6;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
307
Journal Page Range
p. 260-264
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
18. international conference on ion beam modifications of materials
Acronym
IBMM2012
Dates
2-7 Sep 2012
Place
Qingdao (China)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
45065273
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMS; COOLING; DOSES; GRAPHENE; IODINE; ION IMPLANTATION; ION PAIRS; KEV RANGE; OPTIMIZATION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY
Descriptors DEC
CARBON; ELECTRON MICROSCOPY; ELEMENTS; ENERGY RANGE; HALOGENS; HEAT TREATMENTS; LASER SPECTROSCOPY; MICROSCOPY; NONMETALS; SPECTROSCOPY

Optional Information

Copyright
Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.