High-resolution spectroscopy of X-rays emitted from electron bombarded surfaces

The investigations of a compact 6-crystal Johann/Johansson diffraction X-ray spectrometer, covering a wide range (70 eV–15 keV) of photon energies, applied to observe the X-rays emitted from electron bombarded surfaces are discussed in terms of its focusing properties and achievable energy resolution. In the present study the X-ray spectra of Si-Kα_1,2 and Al-Kα_1,2 X-ray lines excited by 5 keV electron beam were measured using PET and TAP crystal, respectively, in the "out-of-focus" geometry which will be used to study the electron/ion surface interactions at the electron beam ion source (EBIS) facility. The measured X-ray spectra were interpreted in terms of the performed ray-tracing simulations which demonstrate the key features of the "out-of-focus" geometry. It was demonstrated that in this case the energy resolution in the range 1–3 eV for photon energy 1–2 keV can be achieved with an increased acceptance for the extension of X-ray source, of about 1 mm, which is important feature for practical applications. Additionally, a dependence of the X-ray intensity and energy resolution on slit opening was studied in details. The results are important for investigations of surfaces with electron and ion impact, in particular, for the future high-resolution X-ray spectroscopy experiments at the EBIS facility