Published March 1985
| Version v1
Journal article
Electron spectroscopy investigation into the surface layers
Creators
Description
Applications of the methods of electron-, X-ray, electron-photoelectron and Auger-spectroscopy for investigations into the thin surface layers of amoAphous metallic alloys, metal coatings and transition layers between the coating and the base metal for determination of reasons for microelectronics failures are considered
Additional details
Additional titles
- Original title (Russian)
- Исследование поверхностных слоев методом электронной спектроскопии
Publishing Information
- Journal Title
- Usp. Fiz. Nauk
- Journal Volume
- 245
- Journal Issue
- 3
- Series
- Usp. Fiz. Nauk.
- Journal Page Range
- 537-542
- ISSN
- 0042-1294
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- USSR
- INIS RN
- 16084199
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- AUGER ELECTRON SPECTROSCOPY; COATINGS; LAYERS; METALS; PHOTOELECTRON SPECTROSCOPY; SURFACES
- Descriptors DEC
- ELECTRON SPECTROSCOPY; ELEMENTS; SPECTROSCOPY