Published 1971
| Version v1
Book
Preparation of resisting tantalum nitride films and a new process of resistance passivation
Creators
- 1. CEA Centre d'Etudes de Bruyeres-le-Chatel, 92 - Montrouge (France)
Description
no abstract available
Additional details
Additional titles
- Original title (French)
- Preparation de couches minces resistantes au nitrure de tantale et description d'un nouveau procede d'ajustage
Publishing Information
- Publisher
- Societe Francaise des Ingenieurs et Techniciens du Vide.
- Imprint Place
- Paris, France
- Imprint Title
- International congress on thin films
- Imprint Pagination
- p. 54-58.
Conference
- Title
- International congress on thin films.
- Dates
- 05 Oct 1970.
- Place
- Cannes, France.
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 2010254
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, Progress Report
- Descriptors DEI
- CHROMIUM ALLOYS; ELECTRIC CONDUCTIVITY; FILMS; GOLD; NICKEL ALLOYS; PASSIVATION; SPUTTERING; TANTALUM NITRIDES
- Descriptors DEC
- CORROSION PROTECTION
Optional Information
- Notes
- Imprint:Congres international sur les couches minces.