Published February 1990
| Version v1
Journal article
Formation of spatial distribution of particles sputtered under ion bombardment of polycrystals
- 1. Moskovskij Gosudarstvennyj Univ., Moscow (USSR)
Description
The results are presented of the experimental and computer (using TRINSP program) studies of spatial distributions of a sputtered material under the Ar+ ions bombardment (30 keV) of a copper polycrystalline target in a wide range of incidence angles of the ions onto the target. The simulation and comparison of its results with the experimental data make it possible to reveal and estimate the contribution of the primary knosk-out mechanism to the formation of the spatial distribution of the sputtered particles
Additional details
Additional titles
- Original title (Russian)
- Формирование пространственных распределений частиц, распыленных при ионной бомбардировке поликристаллов
Publishing Information
- Journal Title
- Poverkhnost': Fizika, Khimiya, Mekhanika
- Journal Issue
- no.2
- Series
- Poverkhn.: Fiz., Khim., Mekh.
- CODEN
- PFKMD
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 22042352
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON IONS; COMPARATIVE EVALUATIONS; COMPUTERIZED SIMULATION; COPPER; ION IMPLANTATION; KEV RANGE 10-100; PHYSICAL RADIATION EFFECTS; SPATIAL DISTRIBUTION; SPUTTERING; TARGETS
- Descriptors DEC
- CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; ENERGY RANGE; EVALUATION; IONS; KEV RANGE; METALS; RADIATION EFFECTS; SIMULATION; TRANSITION ELEMENTS