Published January 2006 | Version v1
Journal article

Room-temperature deposition of diamond-like carbon field emitter on flexible substrates

  • 1. Department of Physics and Texas Center for Superconductivity at UH, University of Houston, 3201 Cullen Boulevard, Houston, TX 77204-5004 (United States)
  • 2. Department of Physics and Center for Advanced Materials, University of Houston, Houston, TX 77204-5005 (United States)
  • 3. Seagate Technology Research Center, 1251 Waterfront Place, Pittsburgh, PA 15222 (United States)

Description

Room-temperature fabrication of diamond-like carbon electron field emitters on flexible polyimide substrate is reported. These thin film field emitters are made using an Ar gas cluster ion beam assisted C6 vapor deposition method. The bond structure of the as-deposited diamond-like carbon film was studied using Raman spectroscopy. The field emission characteristics of the deposited films were also measured. Electron current densities over 15 mA/cm2 have been recorded under an electrical field of about 65 V/μm. These diamond-like carbon field emitters are easy and inexpensive to fabricate. The results are promising for flexible field-emission fabrication without the need of complex patterning and tip shaping as compared to the Spindt-type field emitters

Additional details

Identifiers

DOI
10.1016/j.nimb.2005.08.119;
PII
S0168-583X(05)01643-5;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
243
Journal Issue
1
Journal Page Range
p. 75-78
ISSN
0168-583X
CODEN
NIMBEU

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37069590
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BEAMS; CURRENT DENSITY; DEPOSITION; DIAMONDS; ELECTRIC FIELDS; ELECTRONS; FABRICATION; FIELD EMISSION; ION PAIRS; RAMAN SPECTROSCOPY; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS
Descriptors DEC
CARBON; ELEMENTARY PARTICLES; ELEMENTS; EMISSION; FERMIONS; FILMS; LASER SPECTROSCOPY; LEPTONS; MINERALS; NONMETALS; SPECTROSCOPY; TEMPERATURE RANGE

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.