Room-temperature deposition of diamond-like carbon field emitter on flexible substrates
Creators
- 1. Department of Physics and Texas Center for Superconductivity at UH, University of Houston, 3201 Cullen Boulevard, Houston, TX 77204-5004 (United States)
- 2. Department of Physics and Center for Advanced Materials, University of Houston, Houston, TX 77204-5005 (United States)
- 3. Seagate Technology Research Center, 1251 Waterfront Place, Pittsburgh, PA 15222 (United States)
Description
Room-temperature fabrication of diamond-like carbon electron field emitters on flexible polyimide substrate is reported. These thin film field emitters are made using an Ar gas cluster ion beam assisted C6 vapor deposition method. The bond structure of the as-deposited diamond-like carbon film was studied using Raman spectroscopy. The field emission characteristics of the deposited films were also measured. Electron current densities over 15 mA/cm2 have been recorded under an electrical field of about 65 V/μm. These diamond-like carbon field emitters are easy and inexpensive to fabricate. The results are promising for flexible field-emission fabrication without the need of complex patterning and tip shaping as compared to the Spindt-type field emitters
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2005.08.119;
- PII
- S0168-583X(05)01643-5;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 243
- Journal Issue
- 1
- Journal Page Range
- p. 75-78
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37069590
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BEAMS; CURRENT DENSITY; DEPOSITION; DIAMONDS; ELECTRIC FIELDS; ELECTRONS; FABRICATION; FIELD EMISSION; ION PAIRS; RAMAN SPECTROSCOPY; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS
- Descriptors DEC
- CARBON; ELEMENTARY PARTICLES; ELEMENTS; EMISSION; FERMIONS; FILMS; LASER SPECTROSCOPY; LEPTONS; MINERALS; NONMETALS; SPECTROSCOPY; TEMPERATURE RANGE
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.