Published January 1985 | Version v1
Journal article Metadata-only

Calculation of composed targets for complex composition film obtaining by cathode sputtering method

Creators

Description

A principle of an approach is presented to the calculation of area relationships of sputtered components on the surface of compound targets at cathode sputtering. The calculation is applicable to superconducting joints with the A15 strUcture on the base of Nb - to Nb3Ge films, possessing the highest critical temperature obtained of superconducting transition

Additional details

Additional titles

Original title (Russian)
Расчет составных мишеней для получения пленок сложного состава методом катодного распмления

Publishing Information

Journal Title
Fiz. Khim. Obrab. Mater.
Journal Issue
no.1
Series
Fiz. Khim. Obrab. Mater.
ISSN
0015-3214

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
16077201
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON IONS; CATHODE SPUTTERING; ENERGY DEPENDENCE; FILMS; GERMANIUM ALLOYS; INTERMETALLIC COMPOUNDS; KEV RANGE; NIOBIUM ALLOYS; NUMERICAL SOLUTION; PHYSICAL RADIATION EFFECTS; SUPERCONDUCTIVITY; TARGETS; TRANSITION TEMPERATURE; VACUUM COATING
Descriptors DEC
ALLOYS; CHARGED PARTICLES; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ENERGY RANGE; IONS; PHYSICAL PROPERTIES; RADIATION EFFECTS; SPUTTERING; SURFACE COATING; THERMODYNAMIC PROPERTIES