Published February 1989 | Version v1
Journal article

Ion mixing kinetics study by in situ resistance measurements in the Au/Si system

  • 1. Cornell Univ., Ithaca, NY (USA). Dept. of Materials Science and Engineering

Description

Ion beam mixing studies in the Au/poly-Si and Au/Si (100) system have been conducted by in situ resistance measurements. The relationship between resistance of the irradiated samples and the growth of an amorphous Au5Si2 layer as measured by Rutherford backscattering has been established in this system. An analytical model was employed to explain the linear relation between conductance g and square root of dose Φ1/2. This in situ technique is used to study the kinetics of ion beam mixing in the Au/Si system. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
36
Journal Issue
2
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
153-156
ISSN
0168-583X
CODEN
NIMBE

Optional Information

Contract/Grant/Project number
Contract DMR-86-18761