Published October 2001 | Version v1
Miscellaneous Open

Cluster ion beam facilities

  • 1. Guteborg University and Chalmers University of Technology, Guteborg (Sweden)
  • 2. Belarusian State University, Minsk (Belarus)

Description

A brief state-of-the-art review in the field of cluster-surface interactions is presented. Ionised cluster beams could become a powerful and versatile tool for the modification and processing of surfaces as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed. The outlooks of the Cluster Implantation and Deposition Apparatus (CIDA) being developed in Guteborg University are shown

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Part of:
Proceedings of the Fourth international conference 'Interaction of radiation with solids'

Additional details

Additional titles

Original title (English)
Materialy chetvertoj mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'

Publishing Information

Imprint Place
Minsk (Belarus)
ISBN
985-445-236-0
Imprint Title
Proceedings of the Fourth international conference 'Interaction of radiation with solids'
Imprint Pagination
396 p.
Journal Page Range
p. 376-378
Report number
INIS-BY--059

Conference

Title
4. international conference 'Interaction of radiation with solids'
Original Conference Title
Chetvertaya mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
3-5 Oct 2001
Place
Minsk (Belarus)

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
32068748
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CLUSTER BEAMS; ENERGY BEAM DEPOSITION; ION BEAMS; ION IMPLANTATION; SURFACE PROPERTIES
Descriptors DEC
BEAMS; DEPOSITION; SURFACE COATING

Optional Information

Notes
25 refs., 2 figs. Imprint:Materialy chetvertoj mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'